SPTS Acquires Deep Reactive Ion Etch (DRIE) Product and Technology Assets from Tegal Corporation
SPP Process Technology Systems (SPTS), a leading manufacturer of plasma etch, deposition, and thermal processing equipment for the micro-device industry today announced it had completed the acquisition of the Deep Reactive Ion Etch (DRIE) and certain related assets from Tegal Corporation. In addition, the deal includes the transfer to SPTS of the capital stock and operations of Tegal France SAS, a wholly-owned Tegal subsidiary formed by Tegal's acquisition of Alcatel Micro Machining Systems' DRIE assets in September 2008.
SPTS' acquisition will include the Tegal DRIE product line (including 200, 110, 3200 and 4200 series), along with the Compact and Pluto development assets, intellectual property and process know-how. SPTS will provide continued global support to existing Tegal DRIE customers, and will integrate these technologies into its SPTS' broad range of product offerings in etch, deposition and thermal technologies which it offers to served markets worldwide.
