6540 HRe¯™Wafer Size: 100mm – 200mm
The Tegal 6540 HRe¯™ is a high-density CCP plasma etch tool featuring dual-frequency RF power application and magnetic plasma confinement. The 6540 system is a critical enabler for etching new materials such as platinum and iridium electrode and capacitor structures, ferroelectric materials (PZT, SBT), high-k dielectric materials (BST, STO), and gold interconnect etch. The 6540 is optimized for device design rules down to 90nm. The SIA noted in its Technology Roadmap that the "introduction of new materials into silicon integrated circuit manufacturing" is proceeding at a "rate that is unprecedented in the history of the industry." These new materials are used in developing the latest generation of high-density, high-performance DRAM devices and embedded memory devices. The 6540 is also widely used by non-volatile, ferroelectric random access memory (FeRAM) device makers.
HRe¯™ and Spectra™ are trademarks of Tegal Corporation