The Tegal 4200 SE™ is an advanced, world class cluster platform dedicated to 3D IC and MEMS applications. This system can be configured with up to 4 process modules and 2 cassette modules for mass production.
The Tegal 4200 cluster tool may be configured on request for the most frequently used materials in MEMS and semi-conductor device fabrication: Silicon (Si), Silicon On Insulator (SOI), and Silicon Dioxide (SiO2)
This system is able to provide a wide range of processes with high etch rate, high mask selectivity, excellent etch uniformity, and profile control. Wafer sizes from 100 to 200 mm can be accommodated with a quick size change kit.
4200 SE™ is a trademark of Tegal Corporation
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