ISAF 2008 Symposium
When: February 24-27, 2008
Where: Santa Fe, NM
Tegal will be presenting an invited paper at ISAF 2008
Production Manufacturing of PZT-based Devices: Plasma Etch Process Optimization
and Results for PZT used as a Ferroelectric, as a High K Dielectric, and as a
Piezoelectric Material
http://www.isaf2008.com/ISAF_2008/Home.html
Key Conference 2008
When: March 2-4, 2008
Where: Key West, FL
Tegal will be attending
http://compoundsemiconductor.net/cws/home
CS Mantech 2008
When: April 14-17, 2008
Where: Chicago, IL
Tegal will be exhibiting in Booth #303
http://www.gaasmantech.org/index.htm
IEEE-UFFC Frequency Control Symposium 2008
When: May 19-21, 2008
Where: Honolulu, HI
Tegal has submitted a paper and will be attending
http://www.ieee-uffc.org/2008fcs
Hilton Head 2008
When: June 1-5, 2008
Where: Hilton Head, SC
Tegal will be hosting a poster paper
http://hh2008.org
SEMICON West 2008
When: July 15-17, 2008
Where: San Francisco, CA
Tegal will be exhibiting in Booth #1921 (Moscone South)
http://www.semiconwest.org/index.htm
New at Tegal!
When:
Where:
Tegal is now the exclusive supplier of the AMS (Advanced Modular Sputtering) line of deposition tools for state-of-the-art
aluminum nitride (AlN) based BAW / FBAR / SMR devices.
