Charter of the Audit Committee of the Board of Directors
The Audit Committee oversee the financial reports and other financial information provided by Tegal Corporation to its stockholders and others, the Company's financial policies and procedures and disclosure controls and procedures, the Company's system of internal controls, and the Company's auditing, accounting and financial reporting processes.

Nominating & Corporate Governance Committee Charter
The Nominating Committee assists the Board in identifying individuals qualified to be directors.

Code of Business Conduct and Ethics
Tegal is committed to attaining the highest standards in the conduct of business and in interactions with its customers, suppliers, competitors, and the public.  The Company's Code of Business Conduct and Ethics set forth policies reflecting these values and provide information and resources available to assist in applying the Company's ethical standards.   
 

Compensation Committee Charter
The purpose of the Compensation Committee (the "Committee") of the board of the company is (1) to discharge the Board's responsibilities relating to compensation of the Company's executives, including by designing (with consultation with management or the Board), recommending to the board for approval.

Communication with the Board of Directors

Stockholders may also communicate directly to members of the Board or to the Chairmen of the standing committees. Communications received in writing will be forwarded to the appropriate member if sent to the following addresses:

CHAIRMAN OF THE BOARD,
c/o Tegal Corporation,
2201 S. McDowell Blvd.,
Petaluma CA 94954

CHAIRMAN OF THE NOMINATING COMMITTEE OF THE BOARD,
c/o Tegal Corporation,
2201 S. McDowell Blvd.,
Petaluma CA 94954

CHAIRMAN OF THE AUDIT COMMITTEE OF THE BOARD,
c/o Tegal Corporation,
2201 S. McDowell Blvd.,
Petaluma CA 94954

CHAIRMAN OF THE COMPENSATION COMMITTEE OF THE BOARD,
c/o Tegal Corporation,
2201 S. McDowell Blvd.,
Petaluma CA 94954

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