Tegal provides technical solutions for our customers in a number of key application areas. Feel free to browse this index of applications.

Links are provided to guide you to the relevant product pages for your convenience.

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Title (Click to view details)
FeRAM MFM Stack Etch
Nano-Layer Deposition
Backside Metallization for Power Devices
Aluminum Nitride Sputtering for BAW (FBAR & SMR) Devices
Photoresist Trim / Descum
Notch-Free Silicon DRIE for SOI Wafers
In-situ SiO2 Mask Etch in a Deep Silicon Etch Module
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