Aluminum nitride (AlN) piezoelectric thin films with a strong c-axis <002> crystal orientation are widely used in the new generation of acoustic wave devices such as BAW resonators and filters, and MEMS devices. Film properties such as crystal orientation, thickness uniformity, and low intrinsic stress are very important to ensure optimum device performance and high yield.

Tegal's AMS SMT™ platform is the ideal low-cost development platform for advanced AlN deposition. It offers the ideal combination of entry level pricing and world class process performance.

Tegal's AMS MMT™ production platform is the industry standard for high volume BAW (FBAR and SMR) device production. Don't settle for second best!

Tegal’s Endeavor AT™ physical vapor deposition (PVD) system combines the new MF-RF S-Gun™ with bipolar reactive sputtering, an optimized pre-deposition treatment process module, and sophisticated stress control technology to meet the challenge. This flexible tool platform can support up to five process modules.

The industry leader for AlN thickness uniformity

Endeavor AT™, S-Gun™, AMS SMT™, and AMS MMT™ are trademarks of Tegal Corporation