Tegal Corporation designs, manufactures, markets and services plasma etch and deposition systems that enable the production of IC memory and related microelectronics devices used in personal computers, wireless voice and data telecommunications, radio frequency identification devices (RFID), smart cards, data storage and nano-scale actuators.

New at Tegal!

Tegal is now the exclusive supplier of the Alcatel Micro Machining Systems line of Silicon DRIE tools for state-of-the-art MEMS and 3D-IC devices.

A new ACS Table Upgrade is available for most legacy 901e, 901g, and 903e, tabletop etch systems.